Thermoelastic damping in micro- and nanomechanical systems

Thermoelastic damping in micro- and nanomechanical systems

The importance of thermoelastic damping as a fundamental dissipation mechanism for small-scale mechanical resonators is evaluated in light of recent efforts to design high-Q micrometerand nanometer-scale electromechanical systems. The equations of linear thermoelasticity are used to give a simple derivation for thermoelastic damping of small flexural vibrations in thin beams. It is shown that Z...

Nonlinear damping and dephasing in nanomechanical systems

Juan Atalaya,1,* Thomas W. Kenny,2 M. L. Roukes,3 and M. I. Dykman1 1Department of Physics and Astronomy, Michigan State University, East Lansing, Michigan 48824, USA 2Department of Mechanical Engineering, Stanford University, Stanford, California 94305, USA 3Kavli Nanoscience Institute and Departments of Physics, Applied Physics, and Bioengineering, Caltech, Pasadena, California 91125, USA (Re...

Damping mechanisms in high-Q micro and nanomechanical string resonators

Study Of Thermoelastic Damping in an Electrostatically Deflected Circular Micro-Plate Using Hyperbolic Heat Conduction Model

Thermoelastic damping (TED) in a circular micro-plate resonator subjected to an electrostatic pressure is studied. The coupled thermo-elastic equations of a capacitive circular micro plate are derived considering hyperbolic heat conduction model and solved by applying Galerkin discretization method. Applying complex-frequency approach to the coupled thermo-elastic equations, TED is obtained for...

Investigation of Thermoelastic Damping in the Longitudinal Vibration of a Micro Beam

In the design of high Quality factor (Q) micro or nano beam resonators, different dissipation mechanisms may have damaging effects on the quality factor. One of the major dissipation mechanisms is the thermoelastic damping (TED) that needs an accurate consideration for prediction. In this paper, thermoelastic damping of the longitudinal vibration of a homogeneous micro beam with both ends clamp...